Atomic Layer Deposition (ALD) of Multifunctional Materials
ALD bases on sequential, self-limiting gas-solid surface reactions from at least two molecular precursors. Since the deposition is not limited by the absolute mass transport (in a line-of-sight) of precursor molecules to the substrate, homogeneous coatings with sub-nm control thickness can be achieved even on three-dimensional, high-aspect ratio substrates. In general, ALD provides continuous, pinhole-free films with low content of residual impurities due to its well-defined chemical surface reaction.
We exploit the unique properties of ALD to synthesize functional nanostructures, e.g. metal-oxide opals for thermal barrier coatings, magnetic nanotubes which can be used in magnetic fluids, or core-shell (nano)particles for thermoelectric applications, to name a few of them. Furthermore, ALD processes are developed and optimized to investigate fundamental and promising thin film systems as topological insulators or layered materials.
Combining ALD and complex template systems as available in our group might pave the way to novel applications in (thermo) electrics, optics, or magnetism.
- C. Bae, H. Shin, and K. Nielsch. Surface modification and fabrication of 3D nanostructures by atomic layer deposition.
MRS Bulletin, 36(11):887-897, 2011.
- M. Knez, K. Nielsch, and L. Niinisto. Synthesis and surface engineering of complex nanostructures by atomic layer deposition.
Advanced Materials, 19(21):3425-3438, 2007.
- H. S. Lee, R. Kubrin, R. Zierold, A. Y. Petrov, K. Nielsch, G. A. Schneider, and M. Eich. Photonic properties of titania inverse opal heterostructures.
Optical Materials Express, 3:1007-1019, 2013.
- S. Zastrow, J. Gooth, T. Boehnert, S. Heiderich, W. Toellner, S. Heimann, S. Schulz, and K. Nielsch. Thermoelectric transport and hall measurements of low defect Sb2Te3 thin films grown by atomic layer deposition.
Semiconductor Science and Technology, 28(3):035010, 2013.
- R. Zierold, Z. Y. Wu, J. Biskupek, U. Kaiser, J. Bachmann, C. E. Krill, and K. Nielsch. Magnetic, multilayered nanotubes of low aspect ratios for liquid suspensions.
Advanced Functional Materials, 21(2):226-232, 2011.