Atomic Layer Deposition

Our research group has one main focus on the fabrication of novel nanostructures utilizing atomic layer deposition (ALD) as universal tool for functionalization and modification.

ALD allows for the deposition of thin films of a wide range of materials, e.g. metal oxides, nitrides etc. In order to fabricate nanostructures from such materials, nanoscaled templates are coated by ALD and functionalized or replicated. Such templates might be biological macromolecules, like plant viruses or ferritin as well as inorganic nanostructures like nanowires, nanospheres or nanotubes.