FB Physik : Institute : Institut für Angewandte Physik : Nanostrukturphysik

Fachbereich
Physik

UHH > MIN > FB Physik > Institute und Zentren > Institut für Angewandte Physik > Nanostructure Physics
(Prof. Dr. U. Merkt) > Technology > Cleanroom

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Institute of Applied Physics - Cleanroom

A 100 m² cleanroom of class 100/1000 is jointly operated with the Semiconductor Physics Group of Prof. Dr. Detlef Heitmann and the MBE Group of Prof. Dr. Wolfgang Hansen. This cleanroom is equipped with standard mask and resist technologies, holographic lithography, a scanning electron microscope capable of electron-beam writing, as well as various equipment for the deposition and ion etching of thin films and nanostructures of semiconductors, superconductors, metals, and insulators.

Air System

Scanning Electron Microscope

Basement

Impressum

Letzte Aktualisierung: 23. Sep. 2002 KB